Modelling and Inverse Modelling Of Scanning Capacitance Microscopy For Dopant Profile Extraction
Speaker: Yang David Hong, ITEE
When: 2003-08-07 11:00:00
Venue: 78-420
Host: Associate Professor YT Yeow
Abstract:Scanning capacitance microscopy (SCM) is becoming a powerful tool
for dopant profile extraction for deep submicron silicon integrated
circuits. It is based on high-frequency response of the MOS
capacitor between the SCM probe and the underlying semiconductor. In
early applications of SCM, a change in capacitance at any point on
the semiconductor surface in response to a change in bias is
measured and converted to dopant concentration at that point by
using calibration curves derived from SCM measurement on known
uniformly doped substrates. The approach suffers from the fact that
in the presence of a lateral source of minority carriers (such as in
the space charge region of a pn-junction) where the change in
capacitance deviates significantly from the prediction of the
calibration curves. Better understanding of carrier response to SCM
signal and new quantitative approaches in junction dopant profiling
are needed to fully exploit the nanometer-scale spatial resolution
of SCM and to extend it beyond the status of a junction
visualization tool.
This seminar will cover an introduction to SCM measurement and
numerical modelling of SCM measurement, simulation study of
measurement/material variables affecting SCM data, comparison of
experimental and simulation results of p-n junctions and some
consideration of the approaches to be adopted for inverse modelling
for accurate extraction of junction dopant profile.
Biography:Yang David Hong received the BE(1st Class Hons) degree in Electrical
Engineering from the University of Queensland, Australia in
2000. From 2001 to 2002 he worked in Motorola, Singapore as a
software engineer for embedded systems in mobile
communication. Since 2002 he has been a Ph.D student with the School
of Information Technology and Electrical Engineering at the
University of Queensland.
Type: Ph.D confirmation
Contact:Associate Professor YT Yeow, seminar host (yty@itee.uq.edu.au)
or Guido Governatori (ITEE seminar co-ordinator)
(guido@itee.uq.edu.au)